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Nano Spotlight Environmental Equipment & Supplies
1 equipment items found
Manufactured by:Aerosol Devices, a Division of Handix Scientific based inFort Collins, COLORADO (USA)
Particle contaminants in semiconductor process fluids, such as ultrapure water (UPW) and air, is the bane of the industry and the cause of many defects on wafer surfaces. With ever shrinking wafer nodes, the size of a killer particle is now as small as 7 nm. Traditional on-line monitors, called laser particle counters, reached their theoretical detection limit at 20nm. Without methods ...